Hi everyone I have found a significant discrepancy when I use a very simple (i.e., PLAN2P-type) geometry versus one using Combinatorial Geometry. The layers of W-RE struck by 150-keV electrons are quite thin (0.0001 cm each and using chard=0.0001 cm). The two geometries are shown in the attached PDF files. I am using modified versions of ucsampl5.f and ucsampcg.f and I am finding that electrons backscatter more from the first layer using CG than they do using PLAN2P---both using the same EGS5 and input data! Take a look at the following results: >From ucsampl5_x.out: ENERGY DEPOSITION SUMMARY FOR PARTICLES WITH IQ=-1 IARG 0 1 2 3 4 ROW SUM REGION 1 0.5694778E-01 0.000000 0.7769612E-02 0.000000 0.000000 0.6471739E-01 2 0.7739501E-01 0.000000 0.1081845E-01 0.000000 0.000000 0.8821345E-01 3 0.7826126E-01 0.000000 0.1111047E-01 0.000000 0.000000 0.8937173E-01 4 0.7257108E-01 0.000000 0.1042557E-01 0.000000 0.000000 0.8299665E-01 5 0.6367305E-01 0.000000 0.9229329E-02 0.000000 0.000000 0.7290237E-01 6 0.5353554E-01 0.000000 0.7857990E-02 0.000000 0.000000 0.6139354E-01 7 0.4311949E-01 0.000000 0.6355380E-02 0.000000 0.000000 0.4947488E-01 8 0.3370415E-01 0.000000 0.5003118E-02 0.000000 0.000000 0.3870727E-01 9 0.2506897E-01 0.000000 0.3771369E-02 0.000000 0.000000 0.2884034E-01 10 0.1809285E-01 0.000000 0.2730352E-02 0.000000 0.000000 0.2082320E-01 11 0.2956366E-01 0.000000 0.4535731E-02 0.000000 0.000000 0.3409939E-01 12 0.1587969E-02 0.000000 0.2564311E-03 0.000000 0.000000 0.1844400E-02 13 0.2557094E-03 0.000000 0.4604219E-04 0.000000 0.000000 0.3017516E-03 14 0.2600498E-03 0.000000 0.4834904E-04 0.000000 0.000000 0.3083988E-03 15 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 16 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 17 0.000000 0.000000 0.000000 0.3586720 0.000000 0.3586720 COL SUM 0.5540366 0.000000 0.7995819E-01 0.3586720 0.000000 0.9926667 >From ucsampcg_x.out: ENERGY DEPOSITION SUMMARY FOR PARTICLES WITH IQ=-1 IARG 0 1 2 3 4 ROW SUM REGION 1 0.3091283E-01 0.000000 0.4553527E-02 0.000000 0.000000 0.3546636E-01 2 0.8510116E-01 0.000000 0.8986106E-02 0.000000 0.000000 0.9408727E-01 3 0.7539845E-01 0.000000 0.1045807E-01 0.000000 0.000000 0.8585652E-01 4 0.7138458E-01 0.000000 0.1018348E-01 0.000000 0.000000 0.8156806E-01 5 0.6353604E-01 0.000000 0.9165792E-02 0.000000 0.000000 0.7270183E-01 6 0.5364234E-01 0.000000 0.7795454E-02 0.000000 0.000000 0.6143780E-01 7 0.4389440E-01 0.000000 0.6429661E-02 0.000000 0.000000 0.5032406E-01 8 0.3437023E-01 0.000000 0.5085933E-02 0.000000 0.000000 0.3945616E-01 9 0.2628175E-01 0.000000 0.3872993E-02 0.000000 0.000000 0.3015474E-01 10 0.1606868E-01 0.000000 0.2189591E-02 0.000000 0.000000 0.1825827E-01 11 0.3450066E-01 0.000000 0.5388663E-02 0.000000 0.000000 0.3988932E-01 12 0.1785714E-02 0.000000 0.2871495E-03 0.000000 0.000000 0.2072864E-02 13 0.2528237E-03 0.000000 0.4428248E-04 0.000000 0.000000 0.2971062E-03 14 0.2343868E-03 0.000000 0.4204600E-04 0.000000 0.000000 0.2764328E-03 15 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 16 0.000000 0.000000 0.000000 0.000000 0.000000 0.000000 17 0.000000 0.000000 0.000000 0.3811779 0.000000 0.3811779 COL SUM 0.5373640 0.000000 0.7448275E-01 0.3811779 0.000000 0.9930247 As you can see from there is almost a factor of two difference in the fraction of energy deposited in the first 1-micron thick layer of W-RE.